The
CHAD Wafer Stocker was designed to provide a modular wafer stocker
option to be added to any BOLTS compatible automated wafer handling
system. Providing a modular approach to optimizing the fab
floor with localized stocked bare wafers or test wafers at the
point
of need. Localized wafer stockers provide a reliable way to greatly
enhance the efficiency of existing AMHS systems in the fab.
The
Wafer Stocker can also be used as a wafer buffer to collect and
stock wafers in a fab at critical
process
tools
and optimize the FOUP or cassette inventory for bottle neck
process equipment.
The
CHAD Wafer Stocker can be integrated in to any of the CHAD WaferMate300 series wafer sorting systems. Specialty
sorting and buffering requirements can be developed for any specific
fab
floor
optimization
requirement.
Each
Wafer Stocker/Buffer can store 150 200mm wafers or 100 300mm
wafers. The BOLTs compatible configuration make the stockers ultra
flexible. A single stocker can be deployed to an automated wafer
handling system, or every BOLTS compatible position can have a
stocker. As the fab floor optimization needs change, the
wafer stockers can be redeployed to other areas with out moving
the entire
wafer handling system.
The
BOLTS compatibility offers the potential for retrofitting current
sorters in the fab with a wafer stocker unit.
For more information on CHAD Industries' Wafer Stocker/Buffer, please
click here to
request more information.
