The
CHAD Film-Frame Handler (FFH) provides cost effective automated
film-frame handling for back-end metrology and advanced packaging
process equipment.
The CHAD FFH supports up to 300mm wafer film frames and
minimizes film frame swap time, thereby maximizing the overall
process
equipment throughput.
The
CHAD Film-Frame Handler system is based on Adept SmartModule
linear mechanisms and the Adept SmartServo distributed motion
controller architecture. It is designed for SEMI S2/S8 and
includes intelligent
integrated sensing for cassette presence, cassette size and
height. It also has two independently interlocked loadports.
Available
design options include SMEMA-compliance, compatibility with
overhead transfer and personal guided vehicle mechanisms. Barcode
readers for film frame ID, RF tag readers for cassette ID,
film-frame cassette mapping and film-frame protrusion options
are also available.
Click here to
request more information.
