CHAD Film-Frame Handler (FFH) provides cost effective automated
film-frame handling for back-end metrology and advanced packaging
The CHAD FFH supports up to 300mm wafer film frames and
minimizes film frame swap time, thereby maximizing the overall
CHAD Film-Frame Handler system is based on Adept SmartModule
linear mechanisms and the Adept SmartServo distributed motion
controller architecture. It is designed for SEMI S2/S8 and
integrated sensing for cassette presence, cassette size and
height. It also has two independently interlocked loadports.
design options include SMEMA-compliance, compatibility with
overhead transfer and personal guided vehicle mechanisms. Barcode
readers for film frame ID, RF tag readers for cassette ID,
film-frame cassette mapping and film-frame protrusion options
are also available.