Reticle Handling

Each Reticle Handler is designed to ensure that the optimal solution is achieved in the smallest possible footprint. The reticle handling and management systems are compatible with standard SEMI presentation formats (SMIF pod, shipping box, stepper box) to ensure simple integration with lithography tools. The flexible workcell design also permits the CHAD reticle handling equipment to be configured as either a reticle transfer tool, or a reticle stocker. Specific design consideration is given to airborne molecular contamination (AMC) and filtration systems, to ensure that the reticles remain clean and contaminant free.

CHAD reticle handling systems are built using standard components integrated into a solution custom-designed for your application. Standard components include the end effector, clean-room robots and application software.

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