| WaferMate™ Series |
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WaferMate200™
The WaferMate200™ is configurable in width
for two, three or four 200mm cassettes positions. This region also
accommodates film frames, 300mm open cassettes, and special thin
and warped wafer components. Screen printers, bonders, dispensers, inspection and plasma systems
that traditionally fit a conveyor layout, mate right up to the handler
and the standard SMEMA interface. |
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WaferMate300™
The WaferMate300™ is a 300mm automation platform that can
be adapted for 200mm and smaller substrates with the addition of
CHAD’s cassette shelf module, CHAD’s SMIF-EZ™ pod
opener for SMIF environments, or FOUP bridge tools. As
a class-1 clean FEOL EFEM, the WaferMate300™ includes
all applicable mini-environment components, E84 compliance, and rear
hand-off.
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WaferMate450™
The WaferMate450™ is a highly
configurable, BOLTS-compatible robotic wafer-handling cell
that mates high performance with
cost competitiveness. It is a 450mm automation
platform that can be adapted for 300mm and smaller substrates
with the addition of
CHAD’s cassette shelf module, CHAD’s SMIF-EZ™ pod
opener for SMIF environments, or FOUP bridge tools.
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WaferMateLED™
The WaferMateLED™ series of
wafer handlers have unique solutions to LED automation including
LED grippers, enhancments to the aligner technology, and special
LED mapping hardware. |
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| Other Wafer Handling Systems |
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Film-Frame Handler (FFH)
The
CHAD Film-Frame Handler (FFH) provides cost effective automated
film-frame handling for back-end metrology and advanced packaging
process equipment.
The CHAD FFH supports up to 300mm wafer film frames and
minimizes film frame swap time, thereby maximizing the overall
process
equipment throughput.
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Custom Robotic Wafer Handling
CHAD can custom
design a
system to meet any need. CHAD's extensive experience combining
robots and software control of multiple axis' working together
or
independantly on a single control platform, allows for the
production of stable one-of-a-kind designs. |
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