Automated Wafer Handling Systems

WaferMate™ Series    

CHAD WaferMate200 Automated Wafer Handling System

 

WaferMate200™

The WaferMate200™ is configurable in width for two, three or four 200mm cassettes positions. This region also accommodates film frames, 300mm open cassettes, and special thin and warped wafer components. Screen printers, bonders, dispensers, inspection and plasma systems that traditionally fit a conveyor layout, mate right up to the handler and the standard SMEMA interface.

 

CHAD WaferMate300 Automated Wafer Handling System

 

WaferMate300™

The WaferMate300™ is a 300mm automation platform that can be adapted for 200mm and smaller substrates with the addition of CHAD’s cassette shelf module, CHAD’s SMIF-EZ™ pod opener for SMIF environments, or FOUP bridge tools. As a class-1 clean FEOL EFEM, the WaferMate300™ includes all applicable mini-environment components, E84 compliance, and rear hand-off.

 

 

CHAD WaferMate450 Automated Wafer Handling System

WaferMate450™

The WaferMate450™ is a highly configurable, BOLTS-compatible robotic wafer-handling cell that mates high performance with cost competitiveness. It is a 450mm automation platform that can be adapted for 300mm and smaller substrates with the addition of CHAD’s cassette shelf module, CHAD’s SMIF-EZ™ pod opener for SMIF environments, or FOUP bridge tools.

 

 
CHAD WaferMateLED Automated Wafer Handling System

WaferMateLED

The WaferMateLED series of wafer handlers have unique solutions to LED automation including LED grippers, enhancments to the aligner technology, and special LED mapping hardware.

 

 

 

 
Other Wafer Handling Systems    

CHAD Film Frame Handling System (FFH)

Film-Frame Handler (FFH)

The CHAD Film-Frame Handler (FFH) provides cost effective automated film-frame handling for back-end metrology and advanced packaging process equipment. The CHAD FFH supports up to 300mm wafer film frames and minimizes film frame swap time, thereby maximizing the overall process equipment throughput.

 

 

Custom Wafer Handling Systems

Custom Robotic Wafer Handling

CHAD can custom design a system to meet any need. CHAD's extensive experience combining robots and software control of multiple axis' working together or independantly on a single control platform, allows for the production of stable one-of-a-kind designs.

 
 
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