WaferMate450™ is a highly
configurable, BOLTS-compatible robotic wafer-handling cell
that mates high performance with
expertly with all types of process tools and environments.
For BEOL such as wafer level packaging, the WaferMate450™ is
configured with side and rear handoff to address all wafer handling
requirements. The tool is ideal for traditional conveyor-style
layouts such as screen printers, bonders,
tools as well as for more typical EFEM layouts.
a class-1 clean FEOL EFEM, the WaferMate450™ includes
all applicable mini-environment components, E84 compliance, and rear
CHAD’s systems are made highly effective with WaferWare™,
a third-generation, flexible software suite that allows wide-ranging
application and GUI control.
WaferMate450™ is a 450mm automation
platform that can be adapted for 300mm and smaller substrates
with the addition of
CHAD’s cassette shelf module, CHAD’s SMIF-EZ™ pod
opener for SMIF environments, or FOUP bridge tools.
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