wafer handling systems must address a wide range of application
tools to to be compativle with future technologies.
The WaferWare software is designed to be flexible so that new
process features can be added easily. The basic format is a
screen with tabs for each controllable hardware feature in
the system. The illustration below is for
a specialized wafer transfer system.
module can be easily found in the I/O screen and the controls
needed to quickly operate as single element of hardware.
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