Reticle Handler is designed to ensure that the optimal solution
is achieved in the smallest possible footprint. The reticle
handling and management systems are compatible with standard
SEMI presentation formats (SMIF pod, shipping box, stepper
box) to ensure simple integration with lithography tools. The
flexible workcell design also permits the CHAD reticle handling
equipment to be configured as either a reticle transfer tool,
or a reticle stocker. Specific design consideration is given
to airborne molecular contamination (AMC) and filtration systems,
to ensure that the reticles remain clean and contaminant free.
CHAD reticle handling systems are built using standard components
integrated into a solution custom-designed for your application.
Standard components include the end effector, clean-room robots and
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